Teeb meem
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Hauv kev tsim khoom tiag tiag, ntau qhov kawg - cov neeg siv ntsib teeb meem ib txwm:
* Nquag arcing thaum sputtering
* Nce particle loj hauv zaj duab xis
* Tus nqi tsim yeeb yaj kiab tsis ruaj khov
* Tsawg hom phiaj siv
* Txawv txawv txav ntawm lub hom phiaj nto
* Cov yeeb yaj kiab tsis zoo sib xws -
Ntau tus neeg siv khoom 'thawj cov tshuaj tiv thaiv yog los kho cov khoom siv, tab sis qhov tseeb yog:
Tshaj li 60% ntawm cov teeb meem txawv txav tshwm sim tsis yog nyob rau hauv cov khoom siv, tab sis nyob rau hauv lub hom phiaj sputtering nws tus kheej.
Qhov no yog qhov tseeb tshwj xeeb tshaj yog rau cov hom phiaj zirconium, uas nws cov khoom siv hlau reactive ua rau lawv rhiab heev rau purity, microstructure, thiab kev tsim khoom.
Kab lus no yuav txheeb xyuas ntau yam tseem ceeb cuam tshuam rau kev ruaj ntseg ntawm zirconium lub hom phiaj los ntawm cov khoom siv engineering foundations.
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Purity tsis yog "tus lej game."
Feem ntau zirconium sputtering lub hom phiaj ntawm kev ua lag luam muaj cov hauv qab no purities:
* Zr 99.5%
* Zr 99.9%
* Zr 99.95%
* Zr 99.99%
Ntau tus neeg yuav khoom ntseeg tias:
"Qhov siab dua qhov purity, qhov zoo dua."
Tab sis qhov no tsis yog li ntawd.
Dab tsi cuam tshuam rau sputtering stability tsis yog tag nrho cov purity xwb, tab sis kuj muaj peev xwm los tswj cov impurity tseem ceeb xws li:
* Cov pa oxygen (O)
* Nitrogen (N)
* Cov pa roj carbon (C)
* Hlau (Fe)
* Hafnium (Hf)
thiab lwm yam tseem ceeb impurity ntsiab.
II. Cov ntsiab lus Oxygen yog qhov tseem ceeb cuam tshuam rau Zirconium Target Stability
Zirconium yog cov hlau uas muaj zog heev thiab muaj kev cuam tshuam rau oxygen.
Yog tias cov ntsiab lus oxygen hauv lub hom phiaj zirconium siab dhau, nws yuav ua rau:
* Tsim cov theem hauv zos insulating
* Lub hom phiaj nto tsub zuj zuj
* Ua kom cov paug tawm tsis zoo
* Nce arc zaus
Thaum kawg manifested li:
* Ntau cov yeeb yaj kiab particle suav
* Txo cov qoob loo
* Cov kab noj hniav ntau ntxiv
Qhov teeb meem no tshwj xeeb tshaj yog nyob rau hauv DC Magnetron Sputtering txheej txheem.
Yog li ntawd, rau siab -kawg nyias daim ntawv thov:
* Cov ntsiab lus oxygen feem ntau yuav tsum tau tswj qis dua 1000 ppm
* Qee cov ntawv thov siab - kawg txawm xav tau qis dua 300 ppm
Qhov no kuj yog vim li cas:
Zirconium lub hom phiaj nrog tib lub npe purity ntawm 99.9% tuaj yeem muaj qhov sib txawv ntawm qhov tseeb lifespans thiab sputtering stability.
II. Grain Structure txiav txim siab txog zaj duab xis Uniformity
Ntau tus neeg siv khoom tsuas yog tsom rau cov tshuaj muaj pes tsawg leeg tab sis tsis saib xyuas microstructure.
Hauv kev muaj tiag:
Grain loj thiab microstructure uniformity ncaj qha cuam tshuam rau sputtering tus nqi faib.
Yog hais tias cov nplej yog ntxhib los yog muaj kev ntxhib los mos:
Qhov no yuav ua rau:
* Tsis sib xws sputtering tus nqi hauv qee qhov chaw
* Lub hom phiaj tsis sib xws
* Kev coj txawv txawv hauv thaj chaw sib nqus
* Deteriorated zaj duab xis thickness uniformity
Cov nyhuv no tseem tshaj tawm rau loj -loj tig lub hom phiaj.
IV. Vim li cas siab -Zirconium lub hom phiaj ruaj khov dua?
Internal porosity nyob rau hauv lub hom phiaj cov khoom yog ib qhov chaw ntawm ntau yam anomalies.
Tsawg-Zirconium lub hom phiaj feem ntau nthuav tawm:
* Microporosity
* Cov roj seem
* Localized tshav kub buildup
Hauv qab - lub zog siab:
Cov cheeb tsam no yooj yim rau kev loj hlob:
* Micro{0}} tso tawm
* Thermal tawg
* Localized spalling
Yog li ntawd, siab -kawg zirconium lub hom phiaj feem ntau ua haujlwm:
* Nqus ntes (VAR)
* Kub forging txheej txheem
* HIP (Kub Isostatic Nias)
los txhim kho cov khoom ntom ntom.
Siab - zoo zirconium lub hom phiaj hauv kev lag luam:
Feem ntau xav tau:
* Cov txheeb ze ntom ntom ntau dua lossis sib npaug rau 99% theoretical ntom ntom
Txwv tsis pub, txawm tias sputtering ua tiav thawj zaug, teeb meem kev ruaj ntseg yuav tshwm sim tom qab.
V. Cov txheej txheem sib cog lus feem ntau tsis muaj kev kwv yees
Ntau tus neeg siv khoom tsom mus rau lub hom phiaj lub cev tab sis tsis saib xyuas cov ntawv sib txuas.
Hauv kev muaj tiag:
Lub hom phiaj tsis ua haujlwm feem ntau tsis yog "cov khoom siv teeb meem," tab sis yog "qhov teeb meem tswj kev kub ntxhov."
Yog tias cov txheej txheem sib txuas muaj:
* Tsis muaj
* Local delamination
* Tsis sib xws thermal conductivity
Qhov no yuav ua rau:
* Localized kub nce ntawm lub hom phiaj nto
* Thermal stress concentration
Muaj kev pheej hmoo ntawm kev tawg
Cov txheej txheem sib txuas ua ke muaj xws li:
Cov yam ntxwv txheej txheem
Indium Bonding: Zoo thermal conductivity, haum rau qis- txheej txheem kub
Elastomer Bonding: Lub zog muaj zog buffering muaj peev xwm
Diffusion Bonding: High bonding zog, haum rau siab -siv zog
Cov cuab yeej sib txawv thiab lub zog muaj zog muaj qhov sib txawv kiag li rau cov phiaj xwm kev sib txuas.
Xaus
Rau PVD txheej txheem:
Zirconium sputtering lub hom phiaj tsis yog "consumables."
Lawv yog cov tseem ceeb:
Cov ntaub ntawv tseem ceeb cuam tshuam rau cov yeeb yaj kiab zoo, cov khoom siv ruaj khov, thiab cov khoom tsim tawm.
Tiag tiag ruaj khov zirconium sputtering lub hom phiaj cia siab rau:
* Khoom siv purity tswj
* Microstructure tsim
* Cov txheej txheem densification
* Thermal tswj muaj peev xwm
* Ua tiav qhov system zoo
Rau cov neeg siv kawg -:
Thaum muas zirconium sputtering lub hom phiaj, tus nqi yuav tsum tsis txhob xav txog ib leeg.
Ua kom pom tseeb ntxiv rau:
Txawm hais tias lub hom phiaj sputtering tuaj yeem txhawb nqa koj lub qhov rais txheej txheem mus ntev.
Tuam Tshoj ib tug -tso tseg chaw tsim tshuaj paus ntawm customized sputtering lub hom phiaj
Peb cov khoom muaj cov ntsiab lus qis dua cov pa oxygen, siab dua purity, ntau yam microstructure, loj rotating lub hom phiaj, thiab siv ntau dua.
Lawv muaj kev tswj xyuas ruaj khov: cov txheej txheem smelting, microstructure, txheej txheem sib txuas, thiab ultra- siab purity impurity theem.